GuardianPro-1990 Pod Stockers
The аÄÃÅÁùºÏ²Ê¿ª½±Íø GuardianProâ„¢ 1900 Pod stocker provides fully automated pod handling with an integrated continuous purge system for each individual pod.
Key Features:
- Fully automated RSP150 handling
- Class 1 mini-environment/ESD/AMC
- N2/xCDA purge for each pod
- Purge flow verification
- Manual back up possible
- OHT interface
GuardianPro 1900 Fully-Automatic EUV Pod Stocker
The аÄÃÅÁùºÏ²Ê¿ª½±Íø GuardianProâ„¢ 1900 EUV pod stocker provides a fully automated EUV pod handling and a continuous purge system for each individual pod.
The аÄÃÅÁùºÏ²Ê¿ª½±Íø GuardianPro 1900 Pod stocker provides fully automated pod handling with an integrated continuous purge system for each individual pod.
Key Features:
- Fully automated EUV pod handling
- ISO Class 2 mini-environment
- ESD and AMC controlled environment
- N2/xCDA purge for each pod
- Purge flow verification
- High vacuum decontamination chambers for AMC compound removal
- In-situ measurement capability
- Manual back up possible
- OHT interface